Keeping the dimension for precise parts

●Tough carbon films are produced with

I) Thickness: below 0.5 micron
II) Process temperature: below 100oC

Therefore, there is no change of the dimension for the precise parts.

The film thickness of sub-micron is sufficient, because the film hardness is quite high.
The low temperature of the deposition process is shown below. There is the picture of the tough carbon film on the PET film. Tg (glass transformation) temperature of the PET film is approximately 80 oC. The PET film as a substrate is not changed by the heat of the process, after the deposition. Thus, the process temperature of below 100 oC is proved with this picture.
Though carbon film on a PET film. the process temperature of below 100 oC is proved with this picture.